MKS Instruments VODMC33CR1BE overview
MKS Instruments Type VoDMC33CR1BE Vapor-On-Demand Module. 300 sccm to 3 slm (±3.0% of full scale Flow Accuracy) Flow Rate Range. The Type VoDM-C Vapor on De...
Manufactured byMKS Instruments
Part number or familyVODMC33CR1BE
Product groupVapor-On-Demand Module
Product details
Manufactured byMKS Instruments
Product groupVapor-On-Demand Module
DescriptionMKS Instruments Type VoDMC33CR1BE Vapor-On-Demand Module. 300 sccm to 3 slm (±3.0% of full scale Flow Accuracy) Flow Rate Range.
The Type VoDM-C Vapor on Demand Module (VoDM) is designed to vaporize water and control the flow of water vapor without the need for a carrier gas.
The VoDM unit is available in two models:
The VoDMC52CR1BE model can deliver water vapor in a flow rate from 50 standard cubic centimeters per minute (sccm) to 500 sccm. The VoDMC13CR1BE model can deliver water vapor in a flow rate from 100 standard cubic centimeters per minute (sccm) to 1 standard liter per minute (slm). The VoDMC33CR1BE model can deliver water vapor in a flow rate from 300 standard cubic centimeters per minute (sccm) to 3 standard liters per minute (slm).
The VoDM system consists of three mini-Baratron® absolute pressure transducers, a flow nozzle, two high temperature solenoid valves, and a heater block system capable of maintaining temperatures from 30° to 150° C. Connections at the inlet and outlet are made with Swagelok ® VCR® fittings. The VoDM has a normally closed proportional control valve on both the inlet and outlet lines. These valves are not positive shutoff valves; some leakage across the valve may occur. If your system cannot tolerate leakage across the valve, install a separate, positive shutoff valve.
The system includes an auto balance feature, which compensates for subtle shifts in the zero reading of the two transducers over time. The auto balance feature removes the difference in reading between the transducers, without the need to pump the system down to base pressure and re-zero each transducer separately.
The VoDM includes a status LED that indicates whether the unit is operating normally or has encountered a fault condition.
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MKS Instruments
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Vapor-On-Demand Module
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Green Eagle Logistics
VODMC33CR1BE
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1 For Parts Only - May not function as designed: $99999.00