Inficon BPG400 overview
Inficon BPG400 Ultra High Vacuum Gauges The INFICON Bayard-Alpert Pirani Combination Gauge, BPG400, functions as two gauges in a single compact unit measuring f...
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Manufactured byInficon
Product groupUltra High Vacuum Gauges
DescriptionInficon BPG400 Ultra High Vacuum Gauges
OverviewThe INFICON Bayard-Alpert Pirani Combination Gauge, BPG400, functions as two gauges in a single compact unit measuring from 5 × 10-10 mbar to atmosphere (3.8 × 10-10 Torr to atmosphere). Combining technologies reduces the complexity of installation, setup, and integration. Choose the BPG400 for affordable and repeatable process to base pressure measurements in one economic package.
AdvantagesExtremely wide measurement range from 5 × 10-10 mbar to atmosphere (3.8 × 10-10 Torr to atmosphere) Excellent repeatability in the process pressure range from 10-8 ... 10-2 mbar of 5% The Pirani interlock protects the Bayard-Alpert system from premature filament burnout and excess contamination from high-pressure operation Long-life yttrium oxide coated iridum filament Optional graphic display and Fieldbus interfaces available Automatic high vacuum Pirani adjustment reduces operator interventions RoHS compliance
Typical ApplicationsPressure measurement in semiconductor process and transfer chambers Industrial coating General vacuum measurement and control in the low to ultra-high vacuum range
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Ultra High Vacuum Gauges
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