CyberOptics EX-83Q overview
CyberOptics EX-83Q Wafer Mapping Sensor The EX-Q wafer mapping sensor, featuring reflective laser technology, enables quick and reliable detection of semiconduc...
Product details
Manufactured byCyberOptics
Product groupWafer Mapping Sensor
DescriptionCyberOptics EX-83Q Wafer Mapping Sensor
OverviewThe EX-Q wafer mapping sensor, featuring reflective laser technology, enables quick and reliable detection of semiconductor wafers and slotting errors in cassettes or FOUPs. Available in four standoff distances — 1.5", 2.2", 3.0", and 4.5" — the EX-Q easily mounts on robots and is adaptable to a wide array of mapping applications, offering both on-and off-center wafer scans. It can accommodate mixed wafer batches — for example, dark or coated wafers can be combined with bright wafers — and is compatible with flatted or notched wafers of any size, including 300mm.
Key FeaturesExcels at detecting dark or coated wafers at factory gain setting- Laser transmitters and receivers are fine-tuned for maximum sensitivity while still maintaining Class 1 statusReliably detects cross-slotted and ultra-thin wafers- Thin laser stripe (0.05mm) combined with multiple apertures and spatial filtering reduces noise, improving mapping accuracyInsensitive to interference from the mapping environment- Beam geometry and built-in ambient light filter minimize stray reflections and ambient lighting influencesAccommodates all SEMI® standard wafers, regardless of size or edge geometry, through Patented Dual and Wide Beam technologiesEasy to use “off-the-shelf” direct interface requires no amplification or signal conditioning and reduces the total cost of ownership
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CyberOptics
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Product group
Wafer Mapping Sensor
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