MKS Instruments VoDM overview
MKS Instruments Type VoDM Series Vapor-On-Demand ModulesThe VoDM consists of a Vapor Phase Mass Flow Controller, based on the MKS Type 1153, mated to the outlet...
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Manufactured byMKS Instruments
Product groupVapor-On-Demand Modules
DescriptionMKS Instruments Type VoDM Series Vapor-On-Demand ModulesThe VoDM consists of a Vapor Phase Mass Flow Controller, based on the MKS Type 1153, mated to the outlet of a compact flash vaporizer. The flow of liquid is controlled by the pressure inside the vaporizer, so that a small reservoir of hot vapor is available for immediate use when called for. The 1153 is a choked flow device with an onboard microprocessor that continuously monitors the absolute pressure upstream of the flowcontro l nozzle as well as the differential pressure and pressure ratio across the nozzle. As a result, it continuously determines the flow regime and calculates the flow rate based on the appropriate flow model. Thus, it is able to accurately report the flow rate no matter what the pressure conditions. The microprocessor also functions to control the power to the heaters for both the vaporizer and flow controller body, and controls the flow rate of liquid into the vaporizer. In addition, the VoDM is supplied with a transformer based power supply for the heaters, mounted on top of the flow controller, that requires 110/220VAC.
OverviewA need has been demonstrated for the reliable delivery of water vapor into photoresist strip and post metal etch passivation processes. This has previously been done using a heated vessel of water that produces the vapor and a flow controller to deliver the vapor to the process. Attempts have been made to control this vapor flow with needle valves, thermal mass flow controllers and choked flow technology. These schemes work until the heated reservoir must be refilled. The addition of liquid water to the reservoir causes a drop in its temperature, a concurrent drop in its vapor pressure, and loss of driving force for the vapor into the process.MKS Instruments has developed a single unit, the Vapor on Demand Module, that uses a continuous flow of liquid, eliminating the problems associated with refilling the source vessel. The Vapor on Demand Module, or VoDM, consists of a vaporizer section and a vapor controller section. Liquid is fed directly from the house DI water supply into the vaporizer. The vapor produced is then fed to the mass flow controller which is based on the MKS 1153 Vapor Phase Mass Flow Controller. The control circuits for the various control elements, liquid, vapor and power, are internally controlled by an onboard microprocessor to provide smooth and responsive delivery of water vapor to the process. Communications with the tool are through an analog I/O where flow rate set point and valve overrides are input, and the flow rate of delivered vapor and downstream pressure are reported.
Features & BenefitsProven Based on existing flow technology Based on Baratron® Capacitance Manometer technologyRobust Corrosion resistant materials resist attack by Hot Deionized Water Field proven software controls liquid, vapor and powerCompact Vaporization and vapor mass flow control in one unit Requires only water supply, vapor outlet, AC power, and DC power and signals
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