MKS Instruments AX2700 Series overview
MKS Instruments AX2700 Series SmartSet Components | for Microwave Plasma Subsystem.The AX2700 Series, available in 1.8, 3, and 6kW, consists of all components n...
Manufactured byMKS Instruments
Part number or familyAX2700 Series
Product groupMicrowave Plasma Subsystems
Product details
Manufactured byMKS Instruments
Product groupMicrowave Plasma Subsystems
DescriptionMKS Instruments AX2700 Series SmartSet Components | for Microwave Plasma Subsystem.The AX2700 Series, available in 1.8, 3, and 6kW, consists of all components necessary for microwave plasma processing for applications where MKS customers take responsibility for on-chamber microwave components integration. All components of the SmartSet are highly reliable, factory tested and field proven.
Key FeaturesPhotoresist Removal Passivation & Residue Removal Surface Modification Nitridation Oxide Etch Deposition Silicon Etch Remote Chamber Clean
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Microwave Plasma Subsystems
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