MKS Instruments AX2500 Series overview
MKS Instruments AX2500 Series Integrated Microwave Plasma Subsystems.The MKS AX2500 series is a fully integrated subsystem combining a microwave power generator...
Manufactured byMKS Instruments
Part number or familyAX2500 Series
Product groupMicrowave Plasma Subsystems
Product details
Manufactured byMKS Instruments
Product groupMicrowave Plasma Subsystems
DescriptionMKS Instruments AX2500 Series Integrated Microwave Plasma Subsystems.The MKS AX2500 series is a fully integrated subsystem combining a microwave power generator (1.8kW, 3.0kW and 6.0kW power levels), magnetron head and a precision power detector.
Key FeaturesPhotoresist Removal Passivation & Residue Removal Surface Modification Nitridation Oxide Etch Deposition Silicon Etch Remote Chamber Clean
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Microwave Plasma Subsystems
Explore Microwave Plasma Subsystems
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