MKS Instruments Cv Series overview
MKS Instruments Cv Series Compact Vacuum Valves Designed for use in vacuum systems as gauge isolation, roughing, bypass, or venting valve Used for gauge isolati...
Product details
Manufactured byMKS Instruments
Product groupCompact Vacuum Valves
DescriptionMKS Instruments Cv Series Compact Vacuum Valves
Features & BenefitsDesigned for use in vacuum systems as gauge isolation, roughing, bypass, or venting valve Used for gauge isolation on semiconductor process systems High conductance improves gauge response time and accuracy of gauge readings Compact design for space constrained applications Formed bellows of 321 stainless steel for reduced particle generation and a longer cycle life Manual or pneumatic actuation Interchangeable actuation for normally open and normally closed pneumatic actuators Cycle life exceeding 1,000,000 cycles in clean conditions High purity, corrosion resistant, 304 stainless steel Assorted seal options to meet process needs
OverviewThe Cv Valve has many configurations to suit your system’s particular needs. The angle and inline valves include pneumatic or manual actuation. The manual actuation is attained either through a rotary knob or toggle lever. The rotary knob option allows for conductance variability and includes a visual position indicator.The angle Cv Valve is available in two body sizes, ¾" and 1". The inline model is available in the 1'' size. Both models are available with a variety of flange options, including CF and ISO-KF flanges.The body is comprised of high grade, corrosion resistant, 304 stainless steel with non-magnetic properties to ensure more accurate gauge readings. MKS utilizes clean, tungsten inert gas (TIG) welding for significantly fewer entrapment areas.A formed 321 stainless steel bellows is incorporated into the Cv Valve. The stroke length has been optimized to ensure a longer life cycle while maintaining high conductance.Seal choices for the Cv Valve include Viton® and Chemraz® elastomers for leak-tight operation with a metal bonnet seal option in UHV applications. Vacuum exposed parts are clean and free of lubricants.Additional options include an air solenoid for electro-pneumatic control and a limit switch for remote indication of the valve’s position.A special feature of the pneumatic Cv Valve is a reversible actuation assembly which allows you to change the actuation from normally open to normally closed. In the event of power or air loss, the valve will fail open or closed, depending on the actuation setting of the spring, in about 100 milliseconds.All these standard features provide reliable operation with less down time. The Cv Valve is virtually maintenance-free with a bellows life expectancy of 1,000,000 cycles for the pneumatic version.
ApplicationsThe Cv Valve’s high conductance, compact, durable and dependable design make it the foremost choice for today’s high vacuum process needs. The Cv Valve is ideally suited for the semiconductor industry or research environments. Primarily used for gauge or system isolation, it is also recommended as a venting, bypass, or roughing valve.In gauge isolation applications, the Cv Valve’s high conductance ensures more accurate readings and helps improve gauge response time. The Cv Valve can isolate the sensor from the chamber during venting to atmosphere. If a capacitance manometer is being used, the isolation valve will prevent overpressuring the diaphragm. Where the gauge is used to monitor pressure, and not required for process control, it can be isolated during the process to prevent process gases from contaminating the gauge.
Manufacturer, product group, and supply
See who makes this product, where it belongs, and where available inventory may be listed.
Product group
Compact Vacuum Valves
Explore Compact Vacuum Valves
Available from
Sourcing support available
Start a sourcing request