KLA 21xx Brightfield overview
KLA-Tencor 21xx Series Brightfield Laser Scanning System | Micro-Defect Inspection System
Manufactured byKLA
Part number or family21xx Brightfield
Product groupMicro-Defect Inspection Systems
Product details
Manufactured byKLA
Product groupMicro-Defect Inspection Systems
DescriptionKLA-Tencor 21xx Series Brightfield Laser Scanning System | Micro-Defect Inspection System
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Manufactured by
KLA
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Product group
Micro-Defect Inspection Systems
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