Surfscan 6420

KLA-Tencor Surfscan 6420 Unpatterned Surface Inspection System

The Surfscan 6420 is a versatile surface inspection tool designed to meet the needs of a broad range of applications. Utilizing the latest developments in optical technology, the system easily detects sub-micron particles on rough surfaces such as polysilicon and tungsten, yet provides sensitivity better than 0.10 µm on polished silicon and epitaxial layers. The system's unique combination of oblique illumination, selectable polarization and side collection optics also makes it ideal for detecting defects on non-uniform films — a critical requirement for CMP applications.

The Surfscan 6420 is based on the established Surfscan 6000 series platform, and offers superior performance, low cost of ownership and high throughput.