KLA Alpha-Step IQ overview
KLA-Tencor Alpha-Step IQ Surface Profiler Ideal for pilot lines, R&D, and Industrial quality processes, the Alpha-Step IQ provides all the tools necessary to an...
Product details
Manufactured byKLA
Product groupElectronics Test and Measurement
DescriptionKLA-Tencor Alpha-Step IQ Surface Profiler
OverviewIdeal for pilot lines, R&D, and Industrial quality processes, the Alpha-Step IQ provides all the tools necessary to analyze a variety of surfaces and applications: Film Thickness/Etch SIMS Crater MEMS Optoelectronics Ceramics Industrial Machining Data Storage
Long DescriptionTHE ALPHA-STEP IQ is a state-of-the-art stylus-based surface profiler that combines high measurement precision with versatility and economy. The Alpha-Step IQ is ideal for applications such as pilot lines and materials research. With guaranteed 8Å (1σ) or 0.1% step height repeatability and sub-angstrom resolution, the Alpha-Step IQ provides the best repeatability and performance to analyze and monitor processes. This system offers the most complete suite of two-dimensional analysis features for surface topography analysis on a variety of surfaces including wafers, MEMS, ceramics, SIMS craters, Microlenses, and displays. With many options available, the Alpha-Step IQ offers flexibility for high vertical ranges, powerful optics for sample positioning, integrated data report generator, and multiple language support. The system is controlled by a fast and powerful computing platform offering networking and USB communications. The Alpha-Step IQ enables you to learn faster about your processes and yield higher.
Key BenefitsAdvanced and customizable 2D analysis capabilities Easy positioning of measurement locations via saved site images included in the scan recipe Excellent repeatability and reproducibility Precise determination and analysis of thin step heights, surface micro roughness, micro waviness, and overall form error on thin film coatings Sufficient vertical range for macro topography variations Multiple language support for global customers Template analysis routines by applying saved sets of analysis data Comprehensive process control and trend plotting features
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KLA
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Product group
Electronics Test and Measurement
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