KLA Alpha-Step D-600 overview
KLA-Tencor Alpha-Step D-600 Series Profilers The Alpha-Step® D-600 offers high resolution 2D & 3D profiling, 2D stress, profile stitching, and many more featur...
Manufactured byKLA
Part number or familyAlpha-Step D-600
Product groupElectronics Test and Measurement
Product details
Manufactured byKLA
Product groupElectronics Test and Measurement
DescriptionKLA-Tencor Alpha-Step D-600 Series Profilers
OverviewThe Alpha-Step® D-600 offers high resolution 2D & 3D profiling, 2D stress, profile stitching, and many more features in an easy-to-use platform with the best price-to-performance available in the market. The D-600 system includes an innovative optical lever sensor technology that provides the highest vertical range at 1200 µm, sub-Angstrom resolution plus low force, 0.03 to 15 mg. The ability to measure a wide range of applications, from nanometer to millimeter steps, high resolution roughness, soft materials, and thin film stress enables the D-600 to serve various industries in research and development and production environments.The D-600 includes a 200 mm motorized stage, with 150 x 178 mm X-Y range of motion. The new sequencing software features manual deskew alignment and programming up to 1000 locations on a sample. The system features advanced optics, a high resolution 5 MP camera with a 4x digital zoom and enhanced video controls for highly versatile sample visualization.
Typical ApplicationsThe D-600 is capable of addressing a wide range of measurements and applications: Precision step height Surface form, bow Surface texture Material characterizations Thin film stress3D Scanning
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KLA
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Electronics Test and Measurement
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