KLA Alpha-Step D-500 overview
KLA-Tencor Alpha-Step D-500 Series Profilers The Alpha-Step® D-500 offers high resolution 2D profi ling, 2D stress, profi le stitching, and many more features ...
Manufactured byKLA
Part number or familyAlpha-Step D-500
Product groupElectronics Test and Measurement
Product details
Manufactured byKLA
Product groupElectronics Test and Measurement
DescriptionKLA-Tencor Alpha-Step D-500 Series Profilers
OverviewThe Alpha-Step® D-500 offers high resolution 2D profi ling, 2D stress, profi le stitching, and many more features in an easy-to-use platform with the best price-to-performance available in the market. The D-500 system includes an innovative optical lever sensor technology that provides the highest vertical range at 1200 µm, sub-Angstrom resolution plus low force, 0.03 to 15 mg. The ability to measure a wide range of applications, from nanometer to millimeter steps, high resolution roughness, soft materials, and thin film stress enables the D-500 to serve various industries in research and development and production environments.The D-500 includes a 140 mm manual stage. The system features advanced optics, a high resolution 5 MP camera with a 4x digital zoom and enhanced video controls for highly versatile sample visualization.
Typical ApplicationsThe D-500 is capable of addressing a wide range of measurements and applications: Precision step height Surface form, bow Surface texture Material characterizations Thin film stress
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Manufactured by
KLA
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Product group
Electronics Test and Measurement
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