KLA Alpha-Step D-100 overview
KLA-Tencor Alpha-Step D-100 Benchtop Stylus Profilers The KLA-Tencor Development Series of benchtop stylus profilers offer the most complete range of stylus mea...
Manufactured byKLA
Part number or familyAlpha-Step D-100
Product groupElectronics Test and Measurement
Product details
Manufactured byKLA
Product groupElectronics Test and Measurement
DescriptionKLA-Tencor Alpha-Step D-100 Benchtop Stylus Profilers
OverviewThe KLA-Tencor Development Series of benchtop stylus profilers offer the most complete range of stylus measurement features to meet the needs of the engineering and research communities. These research-grade products merge capability and value with the tool performance expected from KLA-Tencor’s metrology products.The Alpha-Step® D-100 profilometer rapidly and quantitatively measures the 2D topography of surfaces with a 30mm scan length. The Alpha-Step D-100 system includes a Z-sensor range up to 1.2 millimeter, sub-angstrom resolution, 6Å or 0.1% step height repeatability, 140mm manual x-y theta sample positioning stage, and many other features.The graphical user interface has a multi-document interface that allows a user to continually acquire and display scan data. This permits the user to analyze the data while acquiring additional measurements. The profiler software controls support scans to be automatically leveled, scan features measured, and displayed in a Windows compatible format on the screen. All of the windows are independent which mean the control panels and data display windows, real-time scanning window, the data results window can float or be docked anywhere on the screen. This feature gives the user a fully flexible environment in which to acquire and analyze data.
Key BenefitsUp to 30mm scan length Faster measurement cycle — load sample, focus, and then measure Load up to 10 profiles into a single axis view for analysis Open as many profile analysis windows as a user needs Auto step level and step detect functions simplifying the users experience Dynamic results table that supports standard Windows copy and paste and is exportable to any spreadsheet Re-analyze any data set at a later date without having to repeat any measurements
Typical ApplicationsThe D-100 is capable of addressing a wide range of measurements and applications: Surface Texture Precision step height Surface form Thin film stress Biological MEMS Material Characterization And many more
Manufacturer, product group, and supply
See who makes this product, where it belongs, and where available inventory may be listed.
Manufactured by
KLA
View KLA profile
Product group
Electronics Test and Measurement
Explore Electronics Test and Measurement Explore Profilometers Explore Metrology
Available from
Sourcing support available
Start a sourcing request