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CyberOptics EX-QS overview
EX-QS is a wafer mapping sensor made by CyberOptics. CyberOptics EX-QS Wafer Mapping Sensor The EX-QS is an EX-Q wafer mapping sensor repackaged in a smaller case to accommodate applications where space is limited, or where a smaller sensor footprint is desired.The EX-QS enables reliable detection of semiconductor…
Product details
Manufactured byCyberOptics
Product typeWafer Mapping Sensor
DescriptionCyberOptics EX-QS Wafer Mapping Sensor
OverviewThe EX-QS is an EX-Q wafer mapping sensor repackaged in a smaller case to accommodate applications where space is limited, or where a smaller sensor footprint is desired.The EX-QS enables reliable detection of semiconductor wafers and slotting errors in cassettes or FOUPs. It can be used with mixed wafer batches, for example dark or coated wafers can be combined with bright wafers and it is compatible with flatted or notched wafers of any size including 300mm.
Key FeaturesEX-Q performance - excels at detecting dark or coated wafers at factory gain setting- Laser transmitters and receivers fine-tuned for maximum sensitivity to perform out of the box Reliably detects ultra thin and cross-slotted wafers- Thin laser stripe (0.05mm) combined with multiple apertures and spatial filtering reduce noise and improve mapping accuracy Insensitive to interference from mapping environment- Beam geometry and built-in ambient light filter minimize stray reflections and ambient lighting influences Accommodates all SEMI standard wafers, regardless of size or edge geometry, through patented dual and wide beam technologies No moving parts that can result in particulate contamination
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Manufactured by
CyberOptics
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Product type
Wafer Mapping Sensor
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