Air Products ABSOLUTE overview
Air Products ABSOLUTE Series Temperature Control SystemsThe ABSOLUTE Temperature Control System provides accurate and stable temperature control of liquid sourc...
Product details
Manufactured byAir Products
Product groupTemperature Control Systems
DescriptionAir Products ABSOLUTE Series Temperature Control SystemsThe ABSOLUTE Temperature Control System provides accurate and stable temperature control of liquid source chemicals. Five different models provide temperature control through the range of 10°- 90°C, with an accuracy of ± 0.2°C.
Key FeaturesModular design for easy installation Microprocessor-based control circuitry for accurate and stable temperature control Electronic and visual (sight glass) level sense (for monitoring chemical levels) Removable source cup permits safe container installation from the front of the unit Full range of safety interlocks DDC interface for remote control and monitoring Holds 1500cc quartz or 1.2 liter stainless steel containers Stainless steel versions incorporate level sense and integrated lid heater Trans-LC® version eliminates all spark sources and reduces over temperature cutout interlock
ApplicationsTemperature control for CVD source chemicals (i.e. TEOS, ZTOMCATS®, LTO-410™, TMB,TMPI) Temperature control for diffusion and oxide passivation source chemicals (i.e. Trans-LC, TCA, POCl3, and PBr3 and BBr3)
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Air Products
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Temperature Control Systems
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