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Manufactured byAgilent
Product groupModules
DescriptionAgilent 4070 Series Parametric Tester | Ultra-advanced parametric test solution aids fast device development, improved process yields
OverviewThe Agilent 4073A is an ultra-advanced parametric tester. It is designed specifically to meet the needs of the leading-edge semiconductor laboratories and fabrication lines developing next-generation semiconductor devices. It builds on the performance and reliability demonstrated by the large installed base of over 2000 systems (4062 and 4070 family) at major independent device manufacturers and wafer foundries, and the many 4071 and 4072A testers used in pioneering 300-mm wafer fabrication facilities, worldwide.The improvements implemented in the 4073A were determined by system-on-a-chip (SOC) designs, copper interconnects with low dielectric materials, and other IC technology trends. The new instrument can handle advanced parametric tests, as well as flash memory cell evaluations, ring oscillator tests, and WLR tests. It offers excellent performance with an ultra-low noise floor, and has fast low-current measurement settling times and improved measurement precision and resolution. Use it to make DRAM cell evaluations that require current measurement below 100 fA, for example. The 4073A is also ideal for making resistance evaluations of advanced Cu interconnects and for performing matching tests for new analog devices that require measurement capabilities <1 mV.With this total testing solution, you can quickly make both lower current measurements and very low voltage measurements in production environments. Tighten your measurement guard bands and reduce your overall cost of test.
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